| 摘要 |
A rectifying filter of image formation surface brightness of optical equipment using a lens is provided to prevent generation of variation of brightness on the image formation surface by placing a rear of one side concave lens in front of a wafer of a semiconductor exposure system. A rectifying filter of image formation surface brightness of optical equipment using a lens includes one side concave lens(10) and one side convex lens(20). The one side concave lens is made of transparent material. A front of the one side concave lens is concavely depressed. A rear of the one side concave lens is formed in a planar shape. The one side convex lens has the same refractive index as the one side concave lens. A front of the one side convex lens is formed in a planar shape. A rear of the one side convex lens is in contact with the front of the one side concave lens. The rectifying filter of the image formation surface brightness of the optical equipment using the lens prevents generation of variation of brightness on the image formation surface by placing the rear of the one side concave lens in front of the image formation surface of the optical equipment.
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