| 摘要 |
An angular velocity sensor is provided to detect angular velocity of an axis extended in a first direction by using a first turning fork type vibrator, angular velocity of an axis extended in a second direction by using a second turning fork type vibrator, angular velocity of an axis extended in a third direction by using a double gimbal unit. An angular velocity sensor includes first and second turning fork type vibrators(10a,10b) and a double gimbal unit. The first turning fork type vibrator has a first base unit and first arm units extended to a first direction from the first base unit. The second turning fork type vibrator has a second base unit and second arm units extended to a second direction from the second base unit. The double gimbal unit has a driving gimbal unit and a detecting gimbal unit and detects angular velocity of an axis extended in a third direction. The driving gimbal unit vibrates on an axis extended in a fourth direction. The detecting gimbal unit vibrates on an axis extended in a fifth direction.
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