| 摘要 |
A substrate transfer device is provided to prevent a substrate in a FOUP(Front Opening Unified Pod) from being separated from a slot and misplaced. A substrate transfer device comprises a load port(240) and a housing. The load port, on which a container is placed, has a holding member(244), a vertical frame(242), and a supporting member(246). The holding member holds up the container. The vertical frame, assembled to a side part of the holding member and inserted to an opening unit which is formed at a front surface of the housing, has a through hole facing to a door of the container. The supporting member, installed at the vertical frame, supports an outer surface of the container to minimize movement of the container. The housing is located between the load port and a process facility, and has a robot transferring the substrate.
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