| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and a method for processing a substrate capable of improving throughput of substrate processing. SOLUTION: A substrate reversing/moving device 7 is configured with a reversing mechanism 70 and a moving mechanism 30. A rotating mechanism 78 has a motor, etc. built-in, and is capable of rotating, via a link mechanics 77, a first movable member 74 and a second movable member 75 to which first and second supporting members 71 and 72 for supporting a substrate W, respectively, are fixed, around an axis in a horizontal direction by, for example, 180°. A pair of conveying rails 3a are fixed on a base 31 in parallel to a V-direction. A pair of sliding blocks 3e are slidably attached to the pair of conveying rails 3a. A seat part 79 of the reversing mechanism 70 is attached to the sliding block 3e. A linear motion mechanism 3b moves a drive part 3c in a parallel direction to the conveying rails 3a, to reciprocate the reversing mechanism 70 along the conveying rails 3a in the V-direction. COPYRIGHT: (C)2008,JPO&INPIT
|
