VACUUM PROCESSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a vacuum processing apparatus having a foreign substance removing function capable of improving the specimen process yield and the process efficiency. SOLUTION: The vacuum processing apparatus comprises a gate valve for opening and closing a path connecting a processing chamber and a conveyance chamber in a vacuum container for conveying and treating a specimen. At the time of conveying the specimen as the processing object between the processing chamber and the conveyance chamber, the pressure inside the vacuum container is reduced with a pressure adjusting variable valve having a predetermined opening degree disposed in a lower part of the vacuum container. Thereafter, a predetermined amount of gas is supplied into the vacuum container from the introduction hole for forming a gas flow in a state without changing the opening degree of the pressure adjusting variable valve. The specimen is conveyed with the gate valve opened in that state. After the gate valve is closed after specimen conveyance, introduction of the gas is stopped. COPYRIGHT: (C)2008,JPO&INPIT