发明名称 MICROMECHANICAL Z-SENSOR
摘要 The invention relates to a micromechanical Z-sensor with a given sensitivity, a torsion spring (100) and a seismic auxiliary mass (40), the torsion spring (100) having a spring width (105) and the seismic auxiliary mass (40) having webs (110) of a web width (115). The basis of the invention is that the web width (115) is selected to be smaller than the spring width (105).
申请公布号 WO2008071479(A3) 申请公布日期 2008.07.24
申请号 WO2007EP60961 申请日期 2007.10.15
申请人 ROBERT BOSCH GMBH;CLASSEN, JOHANNES;TEBJE, LARS 发明人 CLASSEN, JOHANNES;TEBJE, LARS
分类号 G01P15/125 主分类号 G01P15/125
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