A LOADLOCK CHAMBER HAVING DUAL-ARM AND A TRANSPORTATION SYSTEM FOR PROCESSING SEMICONDUCTOR MATERIAL USING A LOADLOCK CHAMBER HAVING DUAL-ARM

摘要

A loadlock chamber having a dual arm and a transportation system for process a semiconductor material using the same are disclosed. The transportation system comprises a body frame having openings for loading and unloading the semiconductor material thereon; a FOUP loading portion for mounting a FOUP having the semiconductor formed at a vicinity of the openings of the body frame; a transportation robot for unloading the semiconductor material from the FOUP and loading the processed semiconductor material to the FOUP; an indexer for temporarily receive the unloaded and processed semiconductor material from the transportation robot and ascending and descending along an inside of the body frame; a horizontal transferring apparatus for moving forward and backward the indexer; and a plurality of loadlock chambers arranged between the indexer and the process chamber along a moving direction of the indexer and having a dual transportation arm for performing a semiconductor material transporting operation using a reciprocal reverse movement so as to transfer the semiconductor material between the indexer and the process chamber.