发明名称 |
Micromachined optical pressure sensor |
摘要 |
A pressure sensor including: a deflectable diaphragm including a substantially central boss and channel; and, an optical waveguide having first and second arms, wherein the first arm is substantially aligned with an edge of the boss and the second arm is substantially aligned with an edge of the channel.
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申请公布号 |
US2008175529(A1) |
申请公布日期 |
2008.07.24 |
申请号 |
US20080075922 |
申请日期 |
2008.03.14 |
申请人 |
KULITE SEMICONDUCTOR PRODUCTS, INC. |
发明人 |
KURTZ ANTHONY D.;KOCHMAN BOAZ;VANDEWEERT JOSEPH |
分类号 |
G02B6/02;G02B6/00 |
主分类号 |
G02B6/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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