| 摘要 |
PROBLEM TO BE SOLVED: To provide a position detecting method which enables the effective detection of a position of a mark pattern without setting its search range of the mark pattern narrower than an observation range inward. SOLUTION: The method includes: a first determining step of determining whether the whole of a template image corresponds to be in an object image to be searched; a reducing step of creating a reduced template image by reducing a portion of the template image; a verification result acquisition step of acquiring pre-reduction verification results obtained by performing a verification by using the template image being not reduced, and post-reduction verification results obtained by performing the verification by using the reduced template image, when a portion of the template image is determined not to correspond to the object image to be searched by the first determining step; and a position detecting step of detecting the position of the mark pattern by using the pre-reduction verification results or the post-reduction verification results, when a difference between the pre-reduction verification results and the post-reduction verification results acquired by the verification result acquisition step is within a prescribed allowable range. COPYRIGHT: (C)2008,JPO&INPIT
|
