发明名称 |
Deformable mirror device with oscillating states |
摘要 |
A mirror device which deflects incident light includes: a mirror arranged on a substrate and supported by a hinge; an address electrode deflecting the mirror to an ON state, an OFF state, or an oscillating state; a drive circuit applying a voltage to the address electrode; and a first stopper unit determining an oscillation amplitude in the oscillating state.
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申请公布号 |
US2008174855(A1) |
申请公布日期 |
2008.07.24 |
申请号 |
US20070004607 |
申请日期 |
2007.12.24 |
申请人 |
MAEDA YOSHIHIRO;ISHII FUSAO;ICHIKAWA HIROTOSHI;ARAI KAZUMA |
发明人 |
MAEDA YOSHIHIRO;ISHII FUSAO;ICHIKAWA HIROTOSHI;ARAI KAZUMA |
分类号 |
G02F1/31 |
主分类号 |
G02F1/31 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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