发明名称 INKJET RECORDING HEAD, METHOD FOR PRODUCING SAME, AND SEMICONDUCTOR DEVICE
摘要 A method for producing an inkjet recording head includes preparing the substrate having a through hole to be formed into a supply port, the through hole having openings on the first surface and the second surface, the substrate having a first protective layer disposed on the second surface, the first protective layer having an overhang extending into the region of the opening on the second surface. The method also includes forming a second protective layer so as to continuously cover at least the overhang of the first protective layer and the inner wall of the through hole, and removing a portion of the second protective layer corresponding to the opening on the first surface.
申请公布号 US2008173616(A1) 申请公布日期 2008.07.24
申请号 US20080017221 申请日期 2008.01.21
申请人 CANON KABUSHIKI KAISHA 发明人 SAKURAI MAKOTO
分类号 G11B5/127 主分类号 G11B5/127
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