发明名称 WAFER-LEVEL ALIGNMENT OF OPTICAL ELEMENTS
摘要 Methods are disclosed of fabricating an optical assembly An active optical element is disposed near or on a first surface of a slab of optical material (104) A passive optical element is formed on a second surface of the slab, with the second surface being substantially parallel to the first surface (108) An optical axis of the passive optical element is aligned with an optical path between the passive optical element and an active region of the active optical element using a lithographic alignment process (112).
申请公布号 WO2008005894(A3) 申请公布日期 2008.07.24
申请号 WO2007US72582 申请日期 2007.06.29
申请人 APPLIED MATERIALS, INC.;GOEBEL, ANDREAS;WEST, LAWRENCE, C.;WOJCIK, GREGORY, L. 发明人 GOEBEL, ANDREAS;WEST, LAWRENCE, C.;WOJCIK, GREGORY, L.
分类号 G02B6/12;G02B6/26;G02B6/30;G02B6/42 主分类号 G02B6/12
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