| 摘要 |
PROBLEM TO BE SOLVED: To provide substrate collection and delivery equipment which improves the throughput of treatment at low cost, by adjusting the collection and delivery of a substrate to the exposure equipment. SOLUTION: By substrate collection and delivery equipment 60 and 70, a substrate that is carried in from a coater device 20 is carried out and distributed to an exposure portion 30. The substrate that is carried out from the exposure portion 30 is collected to a developer device 40; when the throughputs of the coater device 20 and the developer device 40 and the total of the throughputs of a plurality of exposure portions 30 is substantially equal to each other, the throughputs of the coater device 20, developer device 40, and exposure portion 30 can be exerted to the maximum. Thus, throughput can be improved at low cost, even for the exposure portion 30, whose throughput is low by incorporating the substrate collection and delivery equipment 60 and 70. COPYRIGHT: (C)2008,JPO&INPIT
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