| 摘要 |
PROBLEM TO BE SOLVED: To provide a steam replacing and degassing device capable of stably achieving a degassed state with a high replacing ratio by rapidly controlling a temperature of steam jetted from a nozzle at a target temperature. SOLUTION: In the steam replacing and degassing device, the steam from a steam supply source 31 is heated by a warmer 35, is supplied to the nozzle 3 through a secondary steam supply passage 48 and is jetted from a jetting opening 11. The temperature of the steam is measured at an outlet 38 of the warmer by a first sensor 42, and the difference between the measured temperature and the target temperature is obtained to control a cartridge heater 36. The temperature of the steam is measured at the jetting opening by a second sensor 17, and the difference between the measured temperature and the target temperature is obtained to change the target value of the steam temperature at the outlet of the warmer to the value preliminarily established, depending on the magnitude of the difference. COPYRIGHT: (C)2008,JPO&INPIT
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