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发明名称
Verfahren und Vorrichtung zur Mikrowellenanregung eines Plasmas in einer Ionenstrahlführungsvorrichtung
摘要
申请公布号
DE60130945(T2)
申请公布日期
2008.07.24
申请号
DE20016030945T
申请日期
2001.07.13
申请人
AXCELIS TECHNOLOGIES INC.
发明人
BENVENISTE, VICTOR M.;DIVERGILIO, WILLIAM F.;SINCLAIR, FRANK
分类号
G21K5/04;H01J37/317;H01J37/02;H01J37/05;H01J37/30;H01J37/32;H01J49/42;H01L21/265;H01P3/16
主分类号
G21K5/04
代理机构
代理人
主权项
地址
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