发明名称 METHOD FOR INCREASING PULSE-TO-PULSE UNIFORMITY OF RADIATION BEAM
摘要 <P>PROBLEM TO BE SOLVED: To provide a system which is used to substantially reduce the divergence of a beam traveling between master and power oscillators, for example in a laser beam source. <P>SOLUTION: The system comprises the first and second oscillators and a beam adjusting device. The first oscillator is configured to generate a radiation beam. The beam adjusting device is configured to stabilize a position, a direction, a size, or a divergence of the radiation beam to produce an adjusted beam. The second oscillator is configured to amplify the adjusted beam to produce an amplified beam. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008172202(A) 申请公布日期 2008.07.24
申请号 JP20070294743 申请日期 2007.11.13
申请人 ASML NETHERLANDS BV 发明人 NOORDMAN OSCAR FRANCISCUS J;BUURMAN ERIK PETRUS
分类号 H01S3/00;H01L21/027 主分类号 H01S3/00
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