发明名称 METHOD FOR THE TRANSFER OF STRUCTURAL DATA, AND DEVICE THEREFOR
摘要 The invention relates to a method for transferring structural data into a functional layer. In a first step of said method, the functional layer is made available on a support layer. In a second step, power is transmitted section by section into the functional layer through the support layer such that the physical and/or chemical properties of the functional layer are modified in the area of said section. The invention further relates to a device for carrying out said method.
申请公布号 WO2008087196(A1) 申请公布日期 2008.07.24
申请号 WO2008EP50531 申请日期 2008.01.18
申请人 BASF SE;ECKERLE, PETER;DOETZ, FLORIAN;LEHMANN, UDO;FERCHER, HANS-GEORG 发明人 ECKERLE, PETER;DOETZ, FLORIAN;LEHMANN, UDO;FERCHER, HANS-GEORG
分类号 H01L51/00;B23K26/40 主分类号 H01L51/00
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