| 发明名称 |
COVER FOR PARTIAL SHIELD OF ARC LAMP |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent a shutdown of a lamp at a safely operable temperature to reduce needless outage time of the device so that the lamp may not be unattended and cooled unnecessarily. <P>SOLUTION: The cover for partially shielding an arc lamp includes a reflective plane for preventing or substantially relieving a part of the arc lamp from being exposed to electromagnetic radiation. This means, the cover comprises a reflective plane made of reflective materials suitable for reflecting electromagnetic radiation. <P>COPYRIGHT: (C)2008,JPO&INPIT |
| 申请公布号 |
JP2008171818(A) |
申请公布日期 |
2008.07.24 |
| 申请号 |
JP20080000553 |
申请日期 |
2008.01.07 |
| 申请人 |
ASML NETHERLANDS BV |
发明人 |
MARCEL MATHIJS THEODORE MARIE DIERICHS;VAN BUEL HENRICUS WILHELMUS MARIA;RENE ALEXANDER DOMINICS TOUSSAINT;RAOUL MAARTEN SIMON KNOPS |
| 分类号 |
H01J61/52;G03F7/20;H01J61/50;H01L21/027 |
主分类号 |
H01J61/52 |
| 代理机构 |
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