HEAD SUCTION APPARATUS, DISCHARGE INSPECTION APPARATUS AND LIQUID DROPLET DISCHARGE APPARATUS EQUIPPED WITH THE SAME, METHOD FOR MANUFACTURING ELECTRO-OPTICAL DEVICE, ELECTRO-OPTICAL DEVICE APPARATUS AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a head suction apparatus the cap unit and auxiliary suction unit of which can simply be exchanged in a main body of the head suction apparatus. SOLUTION: The head suction apparatus for sucking a functional liquid from all of discharge nozzles of a functional liquid droplet discharge head is provided with: the cap unit formed by incorporating a head cap for sealing the functional liquid droplet discharge head in a holder plate; the auxiliary suction unit having a suction tube connected to the head cap, a liquid waste tank connected to the suction tube and also to a suction source, and valves and a supporting frame which are arranged on the suction tube; and the main body for holding the cap unit so that the cap unit is attached/detached freely and elevated/lowered freely and holding the auxiliary suction unit so that the auxiliary suction unit is attached/detached freely. COPYRIGHT: (C)2008,JPO&INPIT