| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscope which has a structure in which an inclination, a rotation and a temperature modulating can be attained at the same time and a required portion of a testpiece can be heated at a high speed. SOLUTION: A sample holder 13, 25 with one side of which a testpiece 28 is held and the other side of which is a space is used, and a laser beam irradiating part for heating the sample 28 is introduced near the sample from the space on the other side, and the sample is heated by a focused laser beam. At the same time, an adjustment of an irradiating position of the focused laser beam 16 is carried out by using an optical fiber fine-tuning mechanism for introducing the laser beam 16 close to a sample stand by using an output of an optical position detecting element 27 provided on the sample holder 13, 25. COPYRIGHT: (C)2008,JPO&INPIT
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