| 摘要 |
PROBLEM TO BE SOLVED: To provide a distortion measuring method and a luminance correction method of an electron microscope in which both of the shape and luminance can be corrected by easily measuring the distortion in observation of an electron microscope. SOLUTION: A test piece is formed using a holly carbon and by inserting in a TEM, lens status is adjusted to be suitable for observation, and the image formed by an image formation system is taken in by a digital camera. The image taken in is displayed and circles arranged in lattice form at equal intervals are displayed superposed on the image as a mimetic diagram of holes. The mimetic diagram is matched to the actual holes using a button or the like displayed at the surrounding of the displayed image, and the center of distortion and the size of distortion at the time of matching of the mimetic diagram to the actual holes are calculated, and the center of distortion and the size of distortion are stored. COPYRIGHT: (C)2008,JPO&INPIT
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