| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a jig for film deposition where a film deposition pattern in which all the periphery is connected such as a frame shape and a ring shape can be formed. <P>SOLUTION: The jig for film deposition is provided with: a base member 20 capable of being mounted with a crystal wafer 10; a guide member 30 mounted on the base member 20 and having an opening part 31 from which at least a part of the crystal wafer 10 can be exposed; a mask member 40 whose profile is smaller than that of the opening part 31 and arranged so as to be provided with a gap over all the periphery from the edge of the opening part 31 within the opening part 31 viewed from the above; and a bridge member 50 joining the guide member 30 and the mask member 40. In the bridge member 50, the part arranged on the gap viewed from the side face is arranged at the part upper than the lower face 41 confronted with the base member 20 in the mask member 40 at prescribed intervals. <P>COPYRIGHT: (C)2008,JPO&INPIT |
