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发明名称
BARRIER FILM FORMING INTERNAL ELECTRODE AND FILM FORMING DEVICE
摘要
申请公布号
KR100848221(B1)
申请公布日期
2008.07.24
申请号
KR20077004171
申请日期
2007.02.22
申请人
发明人
分类号
C23C16/509
主分类号
C23C16/509
代理机构
代理人
主权项
地址
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