| 摘要 |
PROBLEM TO BE SOLVED: To change the radiation direction of illumination light with respect to a substrate. SOLUTION: A left lighting system 7 and a right lighting system 8 are arranged as second lighting systems on both sides of a holder body 1 with respect to a first lighting system 4 arranged substantially just above the holder body 1. COPYRIGHT: (C)2008,JPO&INPIT
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