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发明名称
Verfahren zur Herstellung einer Elektrode für Siliziumkarbidhalbleiter
摘要
申请公布号
DE60227022(D1)
申请公布日期
2008.07.24
申请号
DE20026027022
申请日期
2002.03.26
申请人
NGK SPARK PLUG CO. LTD.
发明人
NAKASHIMA, KENSHIRO;OKUYAMA, NAGOYA;YOKOI, HITOSHI;OSHIMA, TAKAFUMI
分类号
H01L21/28;H01L29/45;H01L21/04;H01L29/24;H01L29/861
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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