| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element with high electromechanical conversion efficiency, manufacturing method thereof, and a SAW type touch panel apparatus with such a piezoelectric element as an exciting means and a receiving means. <P>SOLUTION: A piezoelectric element X is equipped with a substrate 11 constituted of a non-piezoelectric material, a piezoelectric film 12 and electrodes 13, 14. The electrode 13 and/or the electrode 14 is interposed between the substrate 11 and the piezoelectric film 12 and made of Al alloy containing, in an amount of 0.1-3 wt.%, a metal selected from a group of Ti, Cr, Ni, Cu, Zn, Pd, Ag, Hf, W, Pt and Au. <P>COPYRIGHT: (C)2008,JPO&INPIT |
