| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a chemically amplified resist composition which shows superior resolution. <P>SOLUTION: The chemically amplified resist composition comprises a resin which comprises a structural unit, having an acid-labile group in a side chain and a structural unit represented by Formula (I) and having a lactone structure in a side chain, and which itself is insoluble or hardly soluble in an alkali aqueous solution but becomes soluble in an alkali aqueous solution due to the action of an acid; and an acid generator represented by Formula (II). <P>COPYRIGHT: (C)2008,JPO&INPIT |
