| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus and a method for laser beam machining by irradiating a workpiece with a laser beam, by which apparatus and method, high machining quality can be achieved. <P>SOLUTION: The apparatus for laser beam machining comprises a laser source for radiating a pulse laser beam based on a trigger signal to be given from outside, a stage for holding the workpiece, a dividing means which divides the pulse laser beam radiated from the laser source into a plurality of variable number pulse laser beams for irradiating the workpiece held by the stage based on a dividing command signal to be given from outside, and a control unit which outputs the dividing command signal to the dividing means so that a plurality of machining points on the workpiece held by the stage is irradiated with the divided pulse laser beams respectively, and also outputs the trigger signal so that the workpiece held by the stage is irradiated with the laser pulses having the number of shots based on the number of the division commanded to the laser source by the dividing command signal. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
