AUDIO DETECTION MECHANISM AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To inexpensively provide an audio detection mechanism in which a deep vibration membrane in a hinge structure can be easily formed without deteriorating reliability such that audio sensitivity is improved. SOLUTION: A through-hole 12 is provided in a central portion on a substrate 10. A vibration membrane 1 including a lower electrode is provided on the substrate 10 so as to cover the through-hole 12. An upper fixed electrode 3 is disposed while interposing an air-gap 4 above the vibration membrane 1. The vibration membrane 1 comprises a hinge structure 19 having a taper angle that is≥50°and≤80°. COPYRIGHT: (C)2008,JPO&INPIT