<p>A charged particle analyser system comprises at least one particle filter to which an electrostatic potential is applied when in use so as to filter charged particles received from a specimen to be analysed in accordance with their respective energies. A charged particle detector is provided for receiving the charged particles from the filter. A deflection system prevents any charged particles returning to the specimen from the particle filter.</p>
申请公布号
WO2008087386(A1)
申请公布日期
2008.07.24
申请号
WO2008GB00117
申请日期
2008.01.14
申请人
OXFORD INSTRUMENTS ANALYTICAL LIMITED;BARKSHIRE, IAN, RICHARD;STATHAM, PETER, JOHN;JACKA, MARCUS
发明人
BARKSHIRE, IAN, RICHARD;STATHAM, PETER, JOHN;JACKA, MARCUS