| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a holding pad easily detachable from and attachable to a polishing plate, and improving efficiency of an operation for exchanging a workpiece. <P>SOLUTION: The holding pad 1 has two polyurethane sheets 2, 3 formed of polyurethane resin. The polyurethane sheets 2, 3 have different compression rates. The polyurethane sheet 2 has a surface layer 2a on a holding face P side contacting a ground material. The polyurethane sheet 3 has a surface layer 3a on a mounting face Q side mounted to a surface plate. Back faces of the polyurethane sheets 2, 3 are bonded to each other. The holding pad 1 is mounted to the surface plate on a mounting face Q of the polyurethane sheet 3 with lower compression rate, and comes into contact with a workpiece on a holding face P of the polyurethane sheet 2 with higher compression rate. Deformation of the polyurethane sheet 3 is restrained in comparison with the polyurethane sheet 2. <P>COPYRIGHT: (C)2008,JPO&INPIT |
