| 摘要 |
PROBLEM TO BE SOLVED: To correct a value detected by a flange position detecting sensor. SOLUTION: A control device 18 has a first storage part 201 for previously storing a correlation as a criterion between the position of a movable flange 32 and a value detected by the flange position detecting sensor 19, and a first processing part 211 for moving the movable flange 32 to a position where the movement is restricted by a restricting part 100, and storing in a second storage part 202 the value detected by the flange position detecting sensor 19 in a state that the movable flange 32 is moved to the position. The control device 18 also has a second processing part 212 for delivering the correlation between the position of the movable flange 32 and the value detected by the flange position detecting sensor 19 on the basis of a value detected by the flange position detecting sensor 19, stored in the second storage part 202 by the first processing part 211, and the correlation as the criterion between the position of the movable flange 32 and the value detected by the flange position detecting sensor 19, stored in the first storage part 201. COPYRIGHT: (C)2008,JPO&INPIT |
