摘要 |
PROBLEM TO BE SOLVED: To efficiently deposit an alignment layer with a desired liquid crystal alignment properties. SOLUTION: In the method for manufacturing the alignment layer, a bottom face layer is deposited with first deposition pressure, and subsequently a surface layer is laminated on the surface of the bottom face layer, by elevating inside pressure of the vacuum chamber 51 to second deposition pressure higher than the first deposition pressure so as to constitute the alignment layer with a laminated film, comprising the bottom face layer and the surface layer. Because the bottom face layer is formed at a low pressure, it has a refractive index higher than that of the surface layer, even when the deposition is conducted at a tilt angle identical to that of the surface layer. Because higher the barrier properties are, the higher refractive index is, the deposited alignment layer has the barrier properties and the alignment properties in combination with each other. COPYRIGHT: (C)2008,JPO&INPIT
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