| 摘要 |
PROBLEM TO BE SOLVED: To suppress acceleration at stage movement when photographing a stuck image or when performing multiple point observation over a visual field, and to prevent deformation of a sample. SOLUTION: A microscope system is equipped with a microscope for observing the sample, a stage on which the sample is laid, a stage driving means for moving the stage and a control means for controlling the stage driving means so that acceleration produced in keeping with movement of the stage does not exceed a prescribed value, when an observation light axis of the microscope is relatively scanned on the stage, by moving the stage toward the light axis by controlling the stage driving means. COPYRIGHT: (C)2008,JPO&INPIT
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