SUBSTRATE FIXING DEVICE AND SUBSTRATE FIXING METHOD

摘要

[PROBLEMS] To provide a substrate fixing device which can prevent occurrence of positional shift even when the moving acceleration of an XY table is high without contaminating a glass mask. [MEANS FOR SOLVING PROBLEMS] The substrate fixing device comprises an XY stage, a support pin for supporting the periphery on the backside of a substrate, a fixing pin for pressing the first side face of the substrate, a push pin for pressing the second side face opposing the first side face, and a means for moving the push pin in the direction perpendicular to the side face and fixing the substrate in place. The support pin may include first and second support pins for supporting the both ends of one side of the periphery on the backside of the substrate, and a third support pin for supporting the center of the periphery on the backside opposing the one side of the periphery on the backside. The fixing means has a drive means for moving the push pin and a pin drive control means for controlling the drive means, and the pin drive control means may control the drive means to stop movement of the push pin when it is judged that a pressure for pressing the substrate has reached a predetermined level.