| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro light scanner equipped with a sensor that accurately measures a rotating angle of a stage supported by torsion springs. SOLUTION: The rotating MEMS device is equipped with: a pair of the torsion springs 30 for supporting both sides of the stage 10; resistors R1-R4 formed along the central axes of the torsion springs 30; and an electric circuit for detecting a resistance change of the resistors R1-R4. The torsion springs 30 are n-type silicon substrates having a face (100), and is formed in a <100> direction. The resistors R1-R4 formed on the torsion springs 30 are formed in a <110> direction by the torsion springs 30. COPYRIGHT: (C)2008,JPO&INPIT
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