发明名称
摘要 <p>A vapor deposition source for depositing organic material includes a boat having a cavity for holding organic material and an aperture plate, having a plurality of spaced apertures, for enclosing the boat. The vapor deposition source also includes a heating element provided in the cavity between the aperture plate and the organic material, and a baffle member in contact with the heating element and having at least three surfaces which absorb energy from the heating element, the first surface redirecting energy to the aperture plate and the second and third surfaces redirecting energy to the boat walls and the organic material.</p>
申请公布号 JP2008527174(A) 申请公布日期 2008.07.24
申请号 JP20070550538 申请日期 2006.01.06
申请人 发明人
分类号 C23C14/24;H01L51/50;H05B33/10 主分类号 C23C14/24
代理机构 代理人
主权项
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