| 摘要 |
PROBLEM TO BE SOLVED: To provide an autohandler with a comparatively inexpensive configuration capable of quickly and precisely changing a temperature of an object device to a setting temperature. SOLUTION: In the autohandler used along with an IC tester equipped with a plurality of sockets 12, a plurality of pushers 13 is disposed so as to corresponds to the sockets respectively, and temperature sensors 14 are disposed at respective pushers. Each pusher is attached to a heat sink 18 through a Peltier element 14. The Peltier element is connected to a current control device 19 along with the temperature sensor, and the current control device controls current applied to the corresponding Peltier element based on an output of each temperature sensor, whereby the temperature of the object device can be precisely controlled individually. COPYRIGHT: (C)2008,JPO&INPIT
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