MAGNETIC SENSOR ELEMENT AND METHOD FOR MANUFACTURING THE SAME

摘要

A magnetic sensor element is provided with a hard magnetic material film (2) formed on a nonmagnetic substrate (1); an insulating layer (3) covering the hard magnetic material film (2); and a soft magnetic material film (4) formed on the insulating layer (3), and the magnetizing direction of the hard magnetic material film (2) is at an angle (?) to the longitudinal direction of the soft magnetic material film (4). In a planar view of the nonmagnetic substrate (1), a region whereupon the soft magnetic material film (2) is formed is preferably within a region larger than that where the soft magnetic material film (4) is formed, and that all the regions whereupon the soft magnetic material film (4) is formed overlap the region whereupon the hard magnetic material film (2) is formed. Uniform bias magnetic field can be obtained from the magnetic sensor element.