| 摘要 |
PROBLEM TO BE SOLVED: To provide an actuator device equipped with a piezoelectric element layer having high strength to stress produced at voltage application to both electrodes and to provide a liquid jetting head. SOLUTION: The piezoelectric element layer 70 includes a first piezoelectric element layer 71 made of columnar crystal 710 formed in a state extending in a right angle direction to the surface of a flat portion of a lower electrode; a third piezoelectric element layer 73 made of columnar crystal 730 formed in a state extending in a right angle direction to the surface of a substrate (flow path formation substrate 10); and a second piezoelectric element layer 72 made of columnar crystal 720 formed on a slanted portion between the first piezoelectric element layer and the second piezoelectric element layer. The columnar crystal of the second piezoelectric element layer extended in a right angle to the surface of the slanted portion is formed in a bent state, where it is extended more in a right angle direction to the surface of the substrate as it goes to the upper electrode side. In addition, the width of crystal grain of the columnar crystal of the second piezoelectric element layer is formed wider than that of the columnar crystal of the first and third piezoelectric element layers. COPYRIGHT: (C)2008,JPO&INPIT |
