ELECTRICAL WIRE STRUCTURE HAVING CARBON NANOTUBE AND METHOD FOR FORMING STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide an electrical wire structure having a carbon nanotube and a method for forming the structure. SOLUTION: An integrated circuit device includes a conductive wire including a carbon nanotube. An electrical wire includes a first metal region. A first conductive barrier layer is formed on the top surface of the first metal region and a second metal region is formed on the first conductive barrier layer. The first conductive barrier layer includes a substance that suppresses the diffusion of the first metal from the first metal region to the outside, and the second metal region includes a catalytic metal internally. An insulating layer having an opening internally is formed on the second metal region. A number of carbon nanotubes are provided as vertical electrical wires in the opening. COPYRIGHT: (C)2008,JPO&INPIT