| 摘要 |
PROBLEM TO BE SOLVED: To facilitate removal of a baked material within a cavity upon manufacture of a multilayer ceramic substrate having the cavity having a small opening dimension. SOLUTION: A method of manufacturing a multilayer ceramic substrate includes steps of: forming a laminate by laminating a plurality of ceramic green sheets 21 including a green sheet 30 for formation of a cavity having a through hole formed therein to be associated with the cavity; laminating a shrinkage suppressing green sheet 22 and an uppermost layer composite green sheet 29 on the outermost layer surface of the laminate; locating a first fitting sheet 25 as a shrinkage suppressing green sheet piece on the bottom surface of the cavity; locating and pressing a burying green sheet 31a and a second fitting sheet 28 on the first fitting sheet 25 in a way they bury the cavity; baking the laminate; and removing a baked material within the cavity after baked. At least part of the burying green sheet 31a and the second fitting sheet 28 has a shrinkage larger than that of the ceramic green sheet 21. COPYRIGHT: (C)2008,JPO&INPIT |
