| 摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration detection unit having fast response speed, high sensitivity, high stability, and the vertex temperature of a frequency temperature characteristic near normal temperature. SOLUTION: This acceleration detection unit comprises a fixed member 2 that is not displaced by acceleration application, a movable member 10 supported by the fixed member in the movable state in the acceleration application direction, a beam 20 having flexibility for connecting the fixed member to the movable member, first and second relaxation members fixed to both ends of the fixed member and movable member, respectively, and a stress sensitive element 30 whose both ends are supported by the first and second relaxation members 40 and 41. The acceleration detection unit is constituted so that the beam displaces the movable member in the acceleration application direction when acceleration is applied to the movable member and expansion/compression stress is applied to the stress sensitive element, and the first and second relaxation members relax the distortion occurring between both ends of the stress sensitive element and the fixed member and movable member. COPYRIGHT: (C)2008,JPO&INPIT |
