| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray analyzer capable of preventing reduction in analysis accuracy of an element having a small content rate, which is caused by a secondary X-ray emitted from an element having a large content rate in a sample. SOLUTION: A secondary filter 30 having a filter film 33 for cutting a specific energy component of the secondary X-ray is provided between a sample placing part and a detection means of the secondary X-ray. The filter film 33 is provided in the covering state of a part of an opening 32 formed on a slide body 31 sliding in the longitudinal direction, and the slide body 31 is moved between a position where an incidence window 16a for allowing the secondary X-ray to enter the detection means is covered with the filter film 33 and a position where the incidence window 16a is not covered. The first shaft 34 is projected into the slide body 31, and a rotating plate 50 rotating around a spindle 51 is allowed to abut and pushed and moved, to thereby move the slide body 31 in one direction, and the slide body 31 is moved in another direction by energization of a torsion coil spring 40. When X-ray analysis is not performed, the slide body 31 is moved to a position where the filter film 33 covers the incidence window 16a. COPYRIGHT: (C)2008,JPO&INPIT
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