| 摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration detection unit and acceleration sensor having fast response speed, high sensitivity, high stability, and excellent temperature characteristics. SOLUTION: This acceleration detection unit comprises a fixed member 2 that is not displaced by acceleration application, a movable member 10 supported by the fixed member in the movable state in the acceleration application direction, a beam 20 having flexibility for connecting the fixed member to the movable member, and a stress sensitive element 30 whose both ends are supported by the fixed member and the movable member. The movable member has a first movable member 11 of a substantially U shape supported by the fixed member via the beam, and a second movable member 12 fixed to the first movable member. The acceleration detection unit is constituted so that the beam displaces the movable member in the acceleration application direction when acceleration is applied to the movable member and expansion/compression stress is applied to the stress sensitive element. COPYRIGHT: (C)2008,JPO&INPIT
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