发明名称 |
ELECTROSTATIC CHUCK WITH HEATER AND MANUFACTURING METHOD THEREOF |
摘要 |
An electrostatic chuck includes a base. The base has a support portion made of alumina ceramics, and a surface portion made of yttria ceramics. The surface portion forms at least a substrate mounting surface and side surface of the base on a surface of the support portion. Carbon contents in alumina ceramics of the support portion and yttria ceramics of the surface portion are 0.05 wt % or less.
|
申请公布号 |
US2008174930(A1) |
申请公布日期 |
2008.07.24 |
申请号 |
US20070854071 |
申请日期 |
2007.09.12 |
申请人 |
NGK INSULATORS, LTD. |
发明人 |
HATTORI AKIYOSHI;NOBORI KAZUHIRO |
分类号 |
H01L21/683;B29C67/04;C04B35/10;C04B35/505 |
主分类号 |
H01L21/683 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|