| 摘要 |
<p>Disclosed is a ceramic member having a high density, a small particle size and excellent plasma resistance. The ceramic member has a microstructure composed of fine particles. The ceramic member has an average particle size of less than 1.5 µm, an open porosity of less than 0.5% as measured by the Archimedian method, and a maximum particle size of less than 3 µm. In the ceramic member, it becomes possible to reduce the number of points at which plasma erosion is likely to begin by reducing the opening porosity thereof. Therefore, the ceramic material can exhibit excellent plasma resistance. In the ceramic member, abnormal growth of particles can be prevented. Therefore, the ceramic powder is composed of fine particles. Thus, the ceramic member is reduced in the particle contamination which may be caused by dusting, and is improved in plasma resistance and particle resistance.</p> |
