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发明名称
GAS EXCITATION DEVICE WITH SURFACE WAVE PLASMA
摘要
申请公布号
EP0995345(B1)
申请公布日期
2008.07.23
申请号
EP19980936460
申请日期
1998.07.07
申请人
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
发明人
MOISAN, MICHEL;ZAKRZEWSKI, ZENON;ETEMADI, ROXANE;ROSTAING, JEAN-CHRISTOPHE
分类号
H01J27/16;H05H1/46;H01J37/32;H05H1/24
主分类号
H01J27/16
代理机构
代理人
主权项
地址
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