ACOUSTIC SURFACE WAVE ELEMENT AND ACOUSTIC SURFACE WAVE DEVICE

摘要

A surface acoustic wave element 1 includes an IDT electrode 11 having an electrode finger 11a on a piezoelectric substrate (10). The electrode finger (11a) is formed by laminating an intermediate layer (12) and an electrode layer (13) having a higher coefficient of thermal expansion than that of the intermediate layer (12). The electrode finger 11a has a cross section of a trapezoidal shape that widens nearer to the piezoelectric substrate (10). An angle (± 1 ) formed with a side surface of the intermediate layer (12) is formed larger than an angle (² 1 ) formed with a side surface of the electrode layer (13). ( Fig. 4 )