Catalyst nanoparticles for obtaining carbon nanotubes

摘要

The present invention provides a method for forming catalyst nanoparticles (5) on a substrate (S) and a method for forming elongate nanostructures (9) on a substrate (S) using the nanoparticles (5) as a catalyst. The methods according to embodiments of the invention may advantageously be used in, for example, semiconductor processing. The methods according to embodiments of the present invention are scalable and fully compatible with existing semiconductor processing technology. Furthermore, the methods according to embodiments of the present invention allow forming catalyst particles (5) and elongate nanostructures (9) at predetermined locations on a substrate (S).